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Product Lineup

• 01

  SiC Focus Ring

  The SiC Focus Ring is primarily used in the etching process. It surrounds the wafer’s edge to uniformly distribute plasma, ensuring precision and consistency in the process.

• 02

  SiC Ring / Cover Plate for Power
  Semiconductors

  The SiC Ring used in power semiconductor manufacturing ensures electrical insulation and stability in high-voltage and high-current processing environments.

• 03

  Shower Head (Electrode)

  The Shower Head is used primarily in the CVD (Chemical Vapor Deposition) process of semiconductor manufacturing, where it evenly disperses gas to enhance the uniformity of the deposition process.

• 04

  SiC Dummy Wafer

  The polycrystalline SiC wafer is used for process testing or to verify conditions in processes such as PVD, CVD, oxidation, and etching.